TAMS Autosampler

The TAMS Autosampler is our new accessory that fits into our TAMS acessory.

TAMS Autosampler can be used for measurements on :

  • 6 inch wafer at different positions
  • Multi-sampling by placing a holder for 19 x 1 inch
  • Multi-sampling by placing a holder for 5 x 2 inch
  • Or your own customised sample plate